Tag Archives: LTPS Display

LTPS (Low Temperature Poly-silicon) is a Si-based material that consists of numerous crystalline silicon clusters of 0.3 up to several microns. In the semiconductor manufacturing industries, poly-silicon is usually formed by solid phase crystallization (SPC) which involves annealing at a temperature above 900°C. However, since the deformation temperature of glass is only 650°C, the SPC method is not suitable for …

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